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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Part Number

Configured Part Number is shown.

Part Number
10-IDG3-01B
10-IDG3-02
10-IDG3-02B
10-IDG3-02B-R
10-IDG3H-01B
10-IDG3H-02
10-IDG3H-02B
10-IDG5-01
10-IDG5-01B
10-IDG5-02
10-IDG5-02-R
10-IDG5-02B
10-IDG5H-02B
10-IDG10-02
10-IDG10-02-R
10-IDG10-02B
10-IDG10-03
10-IDG10-03B
10-IDG10-03B-R
10-IDG10-N02
10-IDG10-N02-R
10-IDG10H-02
10-IDG10H-02B
10-IDG10H-03
10-IDG20-02
10-IDG20-03
10-IDG20-03-R
10-IDG20-03B
10-IDG20-03B-R
10-IDG20H-02
10-IDG20H-03
10-IDG20H-03B-R
10-IDG30A-03
10-IDG30LA-03
10-IDG50A-02
10-IDG50A-02B
10-IDG60-03
10-IDG60-03B
10-IDG60-04
10-IDG60-04B
10-IDG60H-03
10-IDG60H-03B
10-IDG60H-04B
10-IDG60L-04
10-IDG60LA-03B
10-IDG60SA-03
10-IDG60SA-03B
10-IDG75-04
10-IDG75-04B
10-IDG75H-04B
10-IDG75SA-03
10-IDG75SA-03B
10-IDG100-04
10-IDG100-04B
10-IDG100-N04B
10-IDG100H-04
10-IDG100H-04B
10-IDG100H-N04
10-IDG100SA-04
10-IDG100SA-04B
Part NumberMinimum order quantityVolume DiscountDays to ShipEnvironment, Applications Rigidity, Accuracy Tube Nominal Dia. Allowable Kinetic Energy
(J)
Allowable Kinetic Energy
(J)
Format Size Connection port location Switch Lead wire
(m)
Number of switches Port types Connector type Type
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA900.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9B32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BW0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø6Less than 0.0050.001Includes adjusting bolt1Front portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø8Less than 0.0050.0015Includes adjusting bolt2Side portedM9N32 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø10Less than 0.0050.002Includes adjusting bolt3Side portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA930.51 pc.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø10Less than 0.0050.002Includes adjusting bolt3Side portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø10Less than 0.0050.002Includes adjusting bolt3Front portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BW0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedA900.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 31 Day(s) CleanroomStandardø120.005 to Less Than 0.010.006Includes adjusting bolt7Front portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø10Less than 0.0050.002Includes adjusting bolt3Side portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9BV0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA93V0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedA93V0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø10Less than 0.0050.002Includes adjusting bolt3Side portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Front portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Side portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø8Less than 0.0050.0015Includes adjusting bolt2Front portedM9B31 pc.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomStandardø10Less than 0.0050.002Includes adjusting bolt3Side portedM9B0.51 pc.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9BV0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA900.51 pc.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9NV0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø120.005 to Less Than 0.010.006Includes adjusting bolt7Side portedM9NW12 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø8Less than 0.0050.0015Includes adjusting bolt2Side portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø8Less than 0.0050.0015Includes adjusting bolt2Front portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA960.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedA900.51 pc.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø6Less than 0.0050.001Includes adjusting bolt1Side portedM9B32 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø10Less than 0.0050.002Includes adjusting bolt3Front portedM9N32 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø120.005 to Less Than 0.010.006Includes adjusting bolt7Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9P32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9NV0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Side portedM9PV0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Front portedM9BW0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Front portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA930.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Side portedM9B32 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Side portedM9N31 pc.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9NW32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø8Less than 0.0050.0015Includes adjusting bolt2Front portedM9B32 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedA93V32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA900.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Front portedM9B32 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedA930.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Side portedM9N0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 20 Day(s) CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9NV0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø6Less than 0.0050.001Includes adjusting bolt1Side portedM9B0.51 pc.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø6Less than 0.0050.001Includes adjusting bolt1Front portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedA900.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Front portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø6Less than 0.0050.001Includes adjusting bolt1Front portedM9PV0.52 pcs.M3NoneClean Series (Vacuum type)
1 Piece(s) 15 Day(s) CleanroomStandardø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedA900.51 pc.M5NoneClean Series (Vacuum type)

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Basic Information

Type Rotary Table 2-point Stop Main Body Shape Block Shape Oscillation Angle A 190°
Operation Method Double Rack Valves N/A

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