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Vacuum Pad, Standard Type, VPD, One-touch Fitting Type

Part Number

Configured Part Number is shown.

VPD30RS6JECV

A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities

Vacuum pad, standard type: external appearance

Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size (mm)
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)

  • *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).

Fixed Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandardSmall
SymbolVPAVPMAVPBVPMBVPEVPME

Spring Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandard
SymbolVPCVPMCVPDVPMDVPF

Coupling size

Single-action Coupling (mm)Ø1.8, Ø3, Ø4, Ø6
Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter)(mm)Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4

Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp (G) 1/4

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Small pads can be used with semiconductor parts.

Small pads can be used with semiconductor parts.

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space. Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.

  • *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.
Part Number
VPD30RS6JECV
Part NumberMinimum order quantityVolume DiscountDays to ShipRoHS
1 Piece(s) 13 Day(s) or more 10

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Basic Information

Pad Type Standard / Holder Set Pad Shape General Shape Mounting Method Pad Screw Fixed
Rubber Group Material Silicone Rubber Environment Standard Material Rubber-based
Color White Outer Diameter d(φ) 30 Height L1(mm) 11
Mounting Fitting Spring Type Springs Power(N) 7.0~12.6 Stroke(mm) 6
Vacuum Outlet Direction Horizontal Mount Connection Screw M14 Vacuum Outlet Tube Outer Diameter(φ) 6
Fall Prevention Valve With Fall Prevention Valve Direct Attached Filter None

Tech Support

Factory Automation, Electronics, Tools, & MRO (Maintenance, Repair and Operations)
Tel:021-8990-4102 / FAX:021-8990-5803
8:30am - 5:30pm (Monday - Friday)