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Vacuum Pad, Standard Small Type, VPMA, One-touch Fitting Type

Vacuum Pad, Standard Small Type, VPMA, One-touch Fitting Type

A small vacuum pad that is optimally suited for use in semiconductor manufacturing facilities. *The CAD data for this Series is being revised. This data will be made available as soon as the modifications have been completed.

[Features]
· Different pad types are available. These include a general type that is suited for flat work (non-flimsy/thick type work), a deep type that is suited for spherical fruits (apples, etc.) and balls, and a small type that is suited for small work and use inside semiconductor manufacturing facilities.
· This fitting is offered in a wide range of pad sizes, pad materials, and holder shapes.
· Pad holders have been added for applications that require the use of non-copper based metals and measures against low-concentration ozone.
· No copper-based metals are used in the metal component materials. HNBR is utilized for the rubber sealing material.

(i)Caution

  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

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Japanese Only

A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities

Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)

  • *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).

Fixed Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandardSmall
SymbolVPAVPMAVPBVPMBVPEVPME

Spring Type

 Vacuum Outlet, UpperVacuum Outlet, HorizontalDirect Attachment
TypeStandardSmallStandardSmallStandard
SymbolVPCVPMCVPDVPMDVPF

Coupling size

Single-action Coupling (mm)Ø1.8, Ø3, Ø4, Ø6
Barbed Coupling
(Applicable Tube Outer Diameter × Inner Diameter) (mm)
Ø1.8 × Ø1, Ø3 × Ø2, 
Ø4 × Ø2.5, Ø6 × Ø4

Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Small pads can be used with semiconductor parts

Small pads can be used with semiconductor parts

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space. Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.

  • *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.
Part Number
VPMA0.7RMF-3J
VPMA0.7RMF-180J
VPMA0.7RMG-3J
VPMA0.7RMG-180J
VPMA0.7RMN-3J
VPMA0.7RMN-180J
VPMA0.7RMS-3J
VPMA0.7RMS-180J
VPMA0.7RMSE-3J
VPMA0.7RMSE-180J
VPMA0.7RMU-3J
VPMA0.7RMU-180J
VPMA1RMF-3J
VPMA1RMF-180J
VPMA1RMG-3J
VPMA1RMG-180J
VPMA1RMN-3J
VPMA1RMN-180J
VPMA1RMS-3J
VPMA1RMS-180J
VPMA1RMSE-3J
VPMA1RMSE-180J
VPMA1RMU-3J
VPMA1RMU-180J
VPMA1.5RMF-3J
VPMA1.5RMF-180J
VPMA1.5RMG-3J
VPMA1.5RMG-180J
VPMA1.5RMN-3J
VPMA1.5RMN-180J
VPMA1.5RMS-3J
VPMA1.5RMS-180J
VPMA1.5RMSE-3J
VPMA1.5RMSE-180J
VPMA1.5RMU-3J
VPMA1.5RMU-180J
VPMA2RMF-3J
VPMA2RMF-180J
VPMA2RMG-3J
VPMA2RMG-180J
VPMA2RMN-3J
VPMA2RMN-180J
VPMA2RMS-3J
VPMA2RMS-180J
VPMA2RMSE-3J
VPMA2RMSE-180J
VPMA2RMU-3J
VPMA2RMU-180J
VPMA3RMF-3J
VPMA3RMF-180J
VPMA3RMG-3J
VPMA3RMG-180J
VPMA3RMN-3J
VPMA3RMN-180J
VPMA3RMS-3J
VPMA3RMS-180J
VPMA3RMSE-3J
VPMA3RMSE-180J
VPMA3RMU-3J
VPMA3RMU-180J
Part NumberMinimum order quantityVolume DiscountDays to ShipRoHSPad Shape Mounting Method Rubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Tube Outer Diameter
(φ)
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue0.7420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue0.7419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue1420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue1419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue1.5420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue1.5419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray2420.5M53
1 Piece(s) 13 Day(s) or more 10SmallRecessed TypeFluorine RubberStandardGray2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray2420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack2420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White2420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack2420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue2420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue2419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeFluorine RubberStandardGray3419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeNBR which conforms to Food Sanitation LawStandardGray3419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Nitrile Rubber] Nitrile RubberStandardBlack3419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone RubberStandard[White] White3419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed Type[Silicon Rubber] Silicone Rubber +CarbonStandard / Static electricity diffusionBlack3419.9M51.8
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue3420.5M53
1 Piece(s) 13 Day(s) or more -SmallRecessed TypeUrethane RubberStandardBlue3419.9M51.8

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Basic Information

Pad Type Standard / Holder Set Material Rubber-based Mounting Fitting Fixed Type
Vacuum Outlet Direction Top Fall Prevention Valve None Direct Attached Filter None
Metal parts material Standard Specifications

Tech Support

Factory Automation, Electronics, Tools, & MRO (Maintenance, Repair and Operations)
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