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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

XMA Series external appearance

XMA Series external appearance

XYA Series external appearance

XYA Series external appearance

Specifications Table

ModelXMA-16XMA-25
XYA-25
XMA-40
XYA-40
XMA-50
XYA-50
XMA-63
XYA-63
XMA-80
XYA-80
Flange (Valve) Size16, CF0342540, CF0705063, CF11480
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Operating Time (s)0.050.10.210.240.260.28
Flange TypeKF (NW), CFKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Main MaterialMain body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterM5Rc 1/8
Weight kg Note 2:XMA0.33 (0.37)0.611.40 (1.76)23.60 (4.96)6.2
XYA-0.661.422.404.307.70

Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Diagram

XMA (angle type), XYA (in-line type) diagram

XMA (angle type), XYA (in-line type) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Drawing

 

(Unit: mm)

 

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 2

XMA (angle type) dimensional drawing 2

ModelABCDFnFdFcGHP.C.D L1L2
XMA-164010338130-341740P.C.D 276 × ø4.4 mm
XMA-255011348140--2639--
XMA-406515866255-704163P.C.D 58.76 × ø6.6 mm
XMA-507017079275--5268--
XMA-6388196100387951147069P.C.D 92.18 × ø8.4 mm
XMA-80902351173114100-8396--

 

(Unit: mm)

 

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 2

XYA (in-line type) dimensional drawing 2

ModelABCDEFnFdGH
XYA-25100.279.548123.540-2664
XYA-401301066623855-4184
XYA-501781197925375-5295
XYA-63209149100361879570118
XYA-8026817811738011411083142

Notes

  • *Refer to the manufacturer's catalog for parts other than those detailed above.
  • *The product images are representative images only.
Part Number
XMA-16
XMA-16-M9//
XMA-16-M9//-XQ1A
XMA-16-M9BA
XMA-16-M9BB
XMA-16-M9BC
XMA-16-M9BLA
XMA-16-M9NA
XMA-16-M9NA-XN1A
XMA-16-M9NB
XMA-16-M9NB-XP1A
XMA-16-M9NB-XQ1A
XMA-16-M9NB-XR2A
XMA-16-M9NC
XMA-16-M9NLA
XMA-16-M9NLA-XQ1A
XMA-16-M9NMA
XMA-16-M9PLA
XMA-16-XN1A
XMA-16-XP1A
XMA-16-XP1B
XMA-16-XP1C
XMA-16-XQ1A
XMA-16A
XMA-16A-M9//
XMA-16A-M9BLA
XMA-16A-M9NA
XMA-16A-M9NA-XN1B
XMA-16A-M9NA-XQ1A
XMA-16A-M9NC
XMA-16A-M9NLA
XMA-16A-M9PLA
XMA-16A-XN1A
XMA-16C
XMA-16C-M9BA
XMA-16C-M9NLC
XMA-16C-M9PA
XMA-16CA
XMA-16CA-M9//
XMA-16CA-M9NLA
XMA-16CF
XMA-16CG
XMA-16CG-M9//
XMA-16CG-M9BA
XMA-16CG-M9PLB
XMA-16CGH0
XMA-16CH0
XMA-16CH0-XQ1A
XMA-16CK-M9//-XS1B
XMA-16CK-M9BLA-XS1B
XMA-16CKH0-XQ1A
XMA-16F
XMA-16F-M9//
XMA-16F-M9BA
XMA-16F-M9BLC
XMA-16FH0
XMA-16G
XMA-16G-M9//
XMA-16G-M9BA
XMA-16G-M9BC
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Seal Change Location Length of Lead Wire for Switch
(m)
1 Piece(s) 31 Day(s) NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (with built-in magnet)No auto switchKalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)1 pc. (valve open)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9BL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)EPDM (2101-80)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve open)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve open)Barrel Perfluoro (70W)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve open)Kalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve open)Chemraz (SS630)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9NL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9NL (solid-state auto switch)2 pcs. (valve open/closed)Kalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9NM (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9PL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchEPDM (2101-80)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchBarrel Perfluoro (70W)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchBarrel Perfluoro (70W)1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchBarrel Perfluoro (70W)1.3 × 10-10 (FKM) / 1.3 × 10-9 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchKalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) 31 Day(s) NW16Angle typeWith indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9BL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)EPDM (2101-80)1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)Kalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9NL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9PL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchEPDM (2101-80)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 60D-M9NL (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 60D-M9P (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange side5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange side5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange side5 to 60D-M9NL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, left5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, back5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, back5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, back5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, back5 to 60D-M9PL (solid-state auto switch)1 pc. (valve open)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeWith indicatorFlange surface, back5 to 150No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 150No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange side5 to 150No auto-switch (no built-in magnet)No auto switchKalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange surface, left5 to 60No auto-switch (with built-in magnet)No auto switchVMQ (1232-70)1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange surface, left5 to 60D-M9BL (solid-state auto switch)2 pcs. (valve open/closed)VMQ (1232-70)1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote [Others] CF16Angle typeNo indicatorFlange surface, left5 to 150No auto-switch (no built-in magnet)No auto switchKalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, left5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, left5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, left5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, left5 to 60D-M9BL (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, left5 to 150No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, back5 to 60No auto-switch (no built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) 20 Day(s) NW16Angle typeWith indicatorFlange surface, back5 to 60No auto-switch (with built-in magnet)No auto switchFKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, back5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange surface, back5 to 60D-M9B (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--

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Basic Information

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

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