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Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

SMC

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Manual/Bellows Seal, XMH/XYH Series Specifications

Angle valve XMH Series external appearance

Angle valve XMH Series external appearance

In-line type XYH series external appearance

In-line type XYH series external appearance

ModelXMH-16XMH-25
XYH-25		XMH-40
XYH-40		XMH-50
XYH-50
Flange (Valve) Size16, CF0342540, CF07050
Valve TypeManual
FluidsInert gas vacuum
Operating Temperature (°C)5 to 150
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW), CFKF (NW)KF (NW), CFKF (NW)
Main MaterialMain body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Actuation torque N·m0.1 ≤0.15≦0.35≦0.5≦
Handle revolutions571013
Weight kg Note 2:XMH0.31 (0.35)0.571.35 (1.71)2.02
XYH-0.621.372.42

Note 1: Conductance is the value for the “molecular flow” of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Product Drawing

 

(Unit: mm)

 

XMH angle-type dimensional drawing

XMH angle-type dimensional drawing

XYH in-line type dimensional drawing

XYH in-line type dimensional drawing

ModelABCDFnFcGHJP.C.D. L1L2
XMH-1640100.53813034173518P.C.D 276 × ø4.4 mm
XMH-255011448140-2640.521.5--
XMH-4065162.56625570415730P.C.D 58.76 × ø6.6 mm
XMH-5070179.579275-527035--
ModelABCDEFnGHJ
XYH-25100.275.848123.5402640.521.5
XYH-40130102.56623855415730
XYH-501781197925375527035

Product Diagram

XMH angle-type (left) and XYH in-line type (right) diagram

XMH angle-type (left) and XYH in-line type (right) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Notes

  • *The body material is SCS13 (SUS304 equivalent), the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
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Part Number
XMH-16-XN1A
XMH-16-XN1B
XMH-16-XN1C
XMH-16-XP1A
XMH-16-XP1B
XMH-16-XP1C
XMH-16-XQ1A
XMH-16-XQ1B
XMH-16-XQ1C
XMH-16-XR1A
XMH-16-XR2A
XMH-16-XR3A
XMH-16-XT1A
XMH-16-XT1B
XMH-16-XT1C
XMH-16C
XMH-16C-XQ1A
XMH-16C-XQ1B
XMH-16C-XQ1C
XMH-25-XN1A
XMH-25-XP1A
XMH-25-XQ1A
XMH-25-XQ1B
XMH-25-XQ1C
XMH-25-XT1A
XMH-25-XT1B
XMH-25-XT1C
XMH-40-XN1A
XMH-40-XQ1A
XMH-40-XQ1C
XMH-40-XT1A
XMH-40C-XN1A
XMH-40C-XN1C
XMH-40C-XQ1A
XMH-50
XMH-50-XN1A
XMH-50-XQ1A
XYH-25-XN1A
XYH-25-XP1A
XYH-25-XP1B
XYH-25-XP1C
XYH-25-XQ1A
XYH-25-XQ1B
XYH-25-XQ1C
XYH-25-XR1A
XYH-25-XR2A
XYH-25-XR3A
XYH-25-XT1A
XYH-25-XT1B
XYH-25-XT1C
XYH-40-XN1A
XYH-40-XP1A
XYH-40-XP1B
XYH-40-XP1C
XYH-40-XQ1A
XYH-40-XQ1C
XYH-50-XN1A
XYH-50-XP1A
XYH-50-XP1B
XYH-50-XQ1A
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Valve Type Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location
1 Piece(s) Quote KF165Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF165Angle typeEPDM 2101-80Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF165Angle typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF165Angle typeBarrel Perfluoro 70WInternal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF165Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF165Angle typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF165Angle typeChemraz SS592Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeChemraz SS630Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeChemraz SSE38Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF165Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF165Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote CF165Angle typeFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None
1 Piece(s) Quote CF165Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote CF165Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote CF165Angle typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF2514Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514Angle typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF2514Angle typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF2514Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF2514Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF4045Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF4045Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF4045Angle typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF4045Angle typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote CF4045Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote CF4045Angle typeEPDM 2101-80Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote CF4045Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF5080Angle typeFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11None
1 Piece(s) Quote KF5080Angle typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF5080Angle typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF2514In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF2514In-line typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF2514In-line typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF2514In-line typeChemraz SS592Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeChemraz SS630Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeChemraz SSE38Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF2514In-line typeFKM for Plasma 3310-75Internal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF2514In-line typeFKM for Plasma 3310-75Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF4045In-line typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF4045In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF4045In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF4045In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF4045In-line typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF4045In-line typeKalrez 4079Internal: 1.3 × 10-10, External: 1.3 × 10-9External seal
1 Piece(s) Quote KF5080In-line typeEPDM 2101-80Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF5080In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal
1 Piece(s) Quote KF5080In-line typeBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-11Valve seal
1 Piece(s) Quote KF5080In-line typeKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9Valve seal / external seal

Loading...

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Basic Information

Type Manual Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Configure

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61 Part Numbers

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Specification/Dimensions

  • Flange Type

    • KF
    • CF

    Clear

  • Flange Nominal

    • 16
    • 25
    • 40
    • 50

    Clear

  • Sonic Speed Conductance

    • 5
    • 14
    • 14L/S
    • 45
    • 80
    • 80L/S

    Clear

  • Valve Type

    • Angle type
    • In-line type

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Chemraz SSE38
    • Barrel Perfluoro 70W
    • Chemraz (Compound No.: SS592)
    • Chemraz SS592
    • Chemraz SS630
    • VMQ (Formula No.: 1232-70)
    • FKM 1349-80
    • EPDM 2101-80
    • FKM for Plasma 3310-75
    • Kalrez 4079

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10-10, External: 1.3 × 10-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

    Clear

  • Seal Change Location

    • External seal
    • None
    • Valve seal
    • Valve seal / external seal

    Clear

  • type

    • XMH
    • XMH-25
    • XYH
    • XYH-50

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 15 Day(s) or Less

    Clear

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