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XY Stage

Specifications and Features

Purpose/Function: Transport/Movement Positioning/Clamp Processing

Quickly move the vacuum table holding the workpiece to the preset XY position.
Move the vacuum table to any XY position to process the workpiece.
Between the two tables, there are three spaces connected to the suction holes on the table surface.
By switching the valves connected to each space ON/OFF, workpieces of different sizes can be held by suction.
Select an actuator that can withstand the moments at the processing point.

※ This example is for design reference only. Equipment components may differ from the actual shape.

No.	Component	Economy Type Number	Specification	Quantity	Unit Price
①	Actuator	C-KSC6005-B1-500-F5	Drive method: Ball screw Cover: Yes Lead (mm): 5 Repetitive positioning accuracy (μm): ±10 Motor mounting type: In-line type	1	IDR 6,309,753/Piece
②	Coupling	C-SCPW21-5-6	Outer diameter A(φ): 21 Allowable torque range (Nm): 0.05~1.00 Allowable eccentricity range (mm): 0.02~0.2 Maximum rotational speed (r/min): 10000	1	IDR 450,596/Piece
③	Coupling	C-SCPW34-8-10	Outer diameter A(φ): 34 Allowable torque range (Nm): 3.01~5.00 Allowable eccentricity range (mm): 0.02~0.2 Maximum rotational speed (r/min): 10000	1	IDR 596,376/Piece