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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (XMA-16A-M9NA-XQ1A)

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series XMA-16A-M9NA-XQ1A

SMC

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XMA-16A-M9NA-XQ1A

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

XMA Series external appearance

XMA Series external appearance

XYA Series external appearance

XYA Series external appearance

Specifications Table

ModelXMA-16XMA-25
XYA-25		XMA-40
XYA-40		XMA-50
XYA-50		XMA-63
XYA-63		XMA-80
XYA-80
Flange (Valve) Size16, CF0342540, CF0705063, CF11480
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Operating Time (s)0.050.10.210.240.260.28
Flange TypeKF (NW), CFKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Main MaterialMain body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterM5Rc 1/8
Weight kg Note 2:XMA0.33 (0.37)0.611.40 (1.76)23.60 (4.96)6.2
XYA-0.661.422.404.307.70

Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Diagram

XMA (angle type), XYA (in-line type) diagram

XMA (angle type), XYA (in-line type) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Drawing

 

(Unit: mm)

 

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 2

XMA (angle type) dimensional drawing 2

ModelABCDFnFdFcGHP.C.D L1L2
XMA-164010338130-341740P.C.D 276 × ø4.4 mm
XMA-255011348140--2639--
XMA-406515866255-704163P.C.D 58.76 × ø6.6 mm
XMA-507017079275--5268--
XMA-6388196100387951147069P.C.D 92.18 × ø8.4 mm
XMA-80902351173114100-8396--

 

(Unit: mm)

 

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 2

XYA (in-line type) dimensional drawing 2

ModelABCDEFnFdGH
XYA-25100.279.548123.540-2664
XYA-401301066623855-4184
XYA-501781197925375-5295
XYA-63209149100361879570118
XYA-8026817811738011411083142

Notes

  • *Refer to the manufacturer's catalog for parts other than those detailed above.
  • *The product images are representative images only.
30
45
60
  1. 1
Part Number
XMA-16A-M9NA-XQ1A
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)2 pcs. (valve open/closed)Kalrez (4079)1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)--

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  1. 1
 

Basic Information

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XMA-16A-M9NA-XQ1A in the Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series series.

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Specification/Dimensions

  • Seal Change Location

    • External seal
    • None
    • Valve seal
    • Valve seal / external seal

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

    Clear

  • type

    • XMA
    • XYA

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  • Flange Type

    • NW
    • Others
      • CF
      • DN

    Clear

  • Flange Nominal

    • 16
    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Valve Type

    • Angle type
    • In-line type

    Clear

  • Indicator

    • No indicator
    • With indicator

    Clear

  • Pilot Port Direction

    • Flange side
    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Temperature Range(°C)

    • 5 to 60
    • 5 to 150

    Clear

  • Switch Part Number

    • D-M9B (solid-state auto switch)
    • D-M9BL (solid-state auto switch)
    • D-M9BM (solid-state auto switch)
    • D-M9BZ (solid-state auto switch)
    • D-M9N (solid-state auto switch)
    • D-M9NL (solid-state auto switch)
    • D-M9NM (solid-state auto switch)
    • D-M9NZ (solid-state auto switch)
    • D-M9P (solid-state auto switch)
    • D-M9PL (solid-state auto switch)
    • M9B
    • M9N
    • M9P
    • D-A90 (reed auto switch)
    • D-A90L (reed auto switch)
    • A93
    • D-A93 (reed auto switch)
    • D-A93L (reed auto switch)
    • D-A93Z (reed auto switch)
    • No auto-switch (no built-in magnet)
    • No auto-switch (with built-in magnet)

    Clear

  • Number of Switches

    • 1 pc. (valve closed)
    • 1 pc. (valve open)
    • With 1 pc. (Detection position: Valve closing)
    • With 1 pc. (Detection position: Valve opening)
    • 2 pcs. (valve open/closed)
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch

    Clear

  • Seal material

    • Chemraz (Compound No.: SSE38)
    • Chemraz (SSE38)
    • Barrel Perfluoro (70W)
    • Barrel Perfluoro (Compound No.: 70 W)
    • Chemraz (Compound No.: SS592)
    • Chemraz (SS592)
    • Chemraz (SS630)
    • VMQ (1232-70)
    • VMQ (Formula No.: 1232-70)
    • FKM (1349-80)
    • FKM (Formula No.: 1349-80)
    • EPDM (2101-80)
    • EPDM (Formula No.: 2101-80)
    • FKM for Plasma (3310-75)
    • Kalrez (4079)
    • Kalrez (Compound No.: 4079)

    Clear

  • Amount of leakage(Pa·m3/s)

    • 1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • 1.3 × 10-10 (FKM) / 1.3 × 10-9 (FKM) (internal/external)
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
    • 1.3 × 10-8 / 1.3 × 10-11 (FKM) (internal/external)
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
    • 1.3 × 10-8 / 1.3 × 10-9 / SUP >(internal/external)
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 15 Day(s) or Less
    • 20 Day(s) or Less
    • 31 Day(s) or Less

    Clear

Specify Alterations

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Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Temperature Range
(°C) 		Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Seal Change Location Length of Lead Wire for Switch
(m)
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)1 pc. (valve open)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeNo indicatorFlange side5 to 60D-M9B (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9N (solid-state auto switch)1 pc. (valve closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) Quote NW16Angle typeWith indicatorFlange side5 to 60D-M9NL (solid-state auto switch)2 pcs. (valve open/closed)FKM (1349-80)1.3 × 10-10 (FKM) / 1.3 × 10-11 (FKM) (internal/external)--
1 Piece(s) 15 Day(s) NW16Angle typeWith indicatorFlange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11None5

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