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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series (XLAV-16K-2-5LZ)

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series XLAV-16K-2-5LZ

SMC

SMC

A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XLAV-16K-2-5LZ

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series Specifications

XLAV external appearance (side)

XLAV external appearance (side)

ModelXLA(V)-16XLA (V)-25XLA(V)-40XLA(V)-50XLA(V)-63
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature °CXLAV5 to 50
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main MaterialMain body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterXLAVM5: 1 (P) / 3 (R) portsRc1/8: 1 (P) port, M5: 3 (R) ports
Weight (kg)XLAV0.290.491.141.642.96

Note 1: Conductance is the same as that of an elbow with the same dimensions.

Structure/Operation

With solenoid valve

With solenoid valve

Valve side exhaust

Valve side exhaust

*Refer to the manufacturer's catalog for maintenance parts.

By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.

Drawing

XLAV dimensional drawing with solenoid valve

XLAV dimensional drawing with solenoid valve

 

(Unit: mm)

 

ModelJKLMN
XLAV-1635.512.310.23.63.6
XLAV-2540.513.810.23.63.6
XLAV-4050.521.610.23.63.6
XLAV-505724.610.23.63.6
XLAV-6378.528.71242
XLAV dimensional drawing

XLAV dimensional drawing

A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type.

 

(Unit: mm)

 

ModelABCDE Note 1:FnFdGH
XLAV-1640103381-30-1740
XLAV-25501134811240-2639
XLAV-40651586621155-4163
XLAV-50701707921175-5268
XLAV-638819610031187957069

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)

Notes

  • *See the catalog for information on products other than those above.
  • *The product images are representative images only.
30
45
60
  1. 1
Part Number
XLAV-16K-2-5LZ
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Rated Voltage Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m) 		Heater Yes/No
1 Piece(s) Quote NW16-No indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

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  1. 1
 

Basic Information

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 3-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Air Pilot Pipe Port Type Flange Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLAV-16K-2-5LZ in the Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series series.

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Configure Remaining Specifications
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Specification/Dimensions

  • Valve Type

    • Air operated type / with solenoid valve

    Clear

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 1
    • 3
    • 5

    Clear

  • Heater Yes/No

    • 3
    • 5
    • ERROR:#N/A

    Clear

  • type

    • XLAV-16
    • XLAV-25
    • XLAV-40
    • XLAV-50
    • XLAV-63
    • XLAV-80

    Clear

  • Flange Type

    • NW
    • Others
      • DN

    Clear

  • Flange Nominal

    • 16
    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Indicator

    • No indicator
    • With indicator

    Clear

  • Pilot Port Direction

    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Switch Part Number

    • M9B
    • M9N
    • M9P
    • A90
    • A93
    • No auto-switch (no magnet)
    • No auto-switch (with magnet)

    Clear

  • Number of Switches

    • With 1 pc. (Detection position: Valve closing)
    • With 1 pc. (Detection position: Valve opening)
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch

    Clear

  • Seal material

    • Barrel Perfluoro (Compound No.: 70 W)
    • Chemraz (Compound No.: SS592)
    • VMQ (Formula No.: 1232-70)
    • FKM (Formula No.: 1349-80)
    • EPDM (Formula No.: 2101-80)
    • FKM for Plasma (Formula No.: 3310-75)
    • Kalrez (Compound No.: 4079)

    Clear

  • Rated Voltage

    • 24 V DC
    • 100 V AC 50/60 Hz
    • 110 V AC 50/60 Hz
    • 110 V AC, 50/60 Hz
    • 200 V AC 50/60Hz
    • 200 V AC 50/60 Hz
    • 220 V AC 50/60 Hz

    Clear

  • Electrical Entry Method

    • Grommet (lead wire length: 300 mm)
    • Grommet (lead wire length: 600 mm)
    • L-type plug connector
    • M-type plug connector

    Clear

  • Light/Surge Voltage Suppressor

    • None
    • With light and surge voltage suppressor
    • With light and surge voltage suppressor (non-polarized type)
    • With surge voltage suppressor

    Clear

  • Body Surface Treatment

    • External: hard anodized aluminum, Internal: base material
    • External: hard anodized aluminum, internal: anodic oxidation

    Clear

  • Seal Change Location

    • Valve seal 1 / valve seal 2
    • Valve seal 1 / valve seal 2 / external seal
    • None

    Clear

  • CE-marked

    • CE-marked
    • Not compatible

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 15 Day(s) or Less
    • 20 Day(s) or Less
    • 31 Day(s) or Less

    Clear

Specify Alterations

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XLAV-16F-2M9//-5G-Q
XLAV-16F-2M9//-5GU
XLAV-16F-2M9//-5LU
XLAV-16K-2M9//-5LU
XLAV-16K-2M9//-5LZ
XLAV-16K-2M9BA-5LZ
Part NumberMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Rated Voltage Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m) 		Heater Yes/No
1 Piece(s) 15 Day(s) NW16-With indicator-No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneCE-marked--
1 Piece(s) 15 Day(s) NW16-With indicator-No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--
1 Piece(s) 15 Day(s) NW16-With indicator-No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--
1 Piece(s) Quote NW16-No indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--
1 Piece(s) 15 Day(s) NW16Air operated type / with solenoid valveNo indicator-No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-ERROR:#N/A
1 Piece(s) 15 Day(s) NW16Air operated type / with solenoid valveNo indicator-M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

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