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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)
(i)Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- Refer to the manufacturer's catalog for specification and material details.
- The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Japanese Only
Part Number
Configured Part Number is shown.
■Please refer to the following for the details of the auto switch D-M9NJ.
| Part Number | Minimum order quantity | Volume Discount | Days to Ship | Flange Type | Flange Nominal | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Length of Lead Wire for Switch (m) | Heater Yes/No |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | No auto-switch (no magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | No auto-switch (no magnet) | No auto switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | No auto-switch (no magnet) | No auto switch | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | No auto-switch (no magnet) | No auto switch | EPDM 2101-80 | Internal: 1.3 × -10, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | External seal | - | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange side | 5 to 60 | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange side | 5 to 60 | M9B | With 1 pc. (Detection position: Valve opening) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange side | 5 to 60 | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange side | 5 to 60 | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange side | 5 to 60 | M9P | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange side | 5 to 150 | No auto-switch (no magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange surface, left | 5 to 60 | No auto-switch (with magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 16 | Flange surface, left | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, back | 5 to 60 | - | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, back | 5 to 60 | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, back | 5 to 60 | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, back | 5 to 60 | M9B | With 1 pc. (Detection position: Valve opening) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, back | 5 to 60 | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 16 | Flange surface, right | 5 to 60 | M9B | With 1 pc. (Detection position: Valve opening) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | No auto-switch (with magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | No auto-switch (with magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, internal: anodic oxidation | None | - | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | EPDM 2101-80 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange side | 5 to 60 | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9B solid-state auto switch | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9N solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange side | 5 to 60 | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange side | 5 to 60 | M9N | With 1 pc. (Detection position: Valve opening) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange side | 5 to 60 | M9N | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 1 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 60 | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange side | 5 to 60 | M9P | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 150 | D-M9NJL | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 150 | D-M9NJL | 1 pc. valve open | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange side | 5 to 150 | D-M9NJL | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | With heater for 120℃ | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | - | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange surface, left | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | EPDM (Formula No.: 2101-80) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Barrel Perfluoro (Compound No.: 70 W) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Barrel Perfluoro (Compound No.: 70 W) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange surface, left | 5 to 60 | D-A93 reed auto switch (Flange size 16 not supported) | 2 pcs. valve open/closed | Kalrez 4079 | Internal: 1.3 × -8, External: 1.3 × -8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Kalrez (Compound No.: 4079) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | External seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Kalrez (Compound No.: 4079) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Chemraz (Compound No.: SS592) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Chemraz (Compound No.: SS630) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | Chemraz (Compound No.: SSE38) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-8 | External: hard anodized aluminum, Internal: base material | Valve seal 1 / valve seal 2 / external seal | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | M9B | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange surface, left | 5 to 60 | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 60 | M9B | With 1 pc. (Detection position: Valve opening) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange surface, left | 5 to 150 | No auto-switch (no magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, left | 5 to 150 | M9NJ | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 3 | None | ||
| 1 Piece(s) | Quote | KF | 25 | Flange surface, back | 5 to 60 | No auto-switch (no magnet) | No auto switch | FKM 1349-80 | Internal: 1.3 × -10, External: 1.3 × -10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, back | 5 to 60 | A93 | With 2 pcs. (Detection position: Valve opening and closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, back | 5 to 60 | No auto-switch (with magnet) | No auto switch | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | - | None | ||
| 1 Piece(s) | 15 Day(s) | KF | 25 | Flange surface, back | 5 to 60 | M9B | With 1 pc. (Detection position: Valve closing) | FKM (Formula No.: 1349-80) | Internal: 1.3 × 10^-10 External: 1.3 × 10^-10 | External: hard anodized aluminum, Internal: base material | None | 0.5 | None |
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Basic Information
| Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
| Seal Type | Elastic Seal |
Specification/Dimensions
-
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
-
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Temperature Range(°C)
- 5 to 60
- 5 to 150
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × -10, External: 1.3 × -10
- Internal: 1.3 × -10, External: 1.3 × -8
- Internal: 1.3 × -8, External: 1.3 × -10
- Internal: 1.3 × -8, External: 1.3 × -8
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-8
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-8
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
-
type
- XLG
- XLG-16
- XLG-25
- XLG-40
- XLG-50
- XLG-63
- XLG-80
-
Flange Type
- KF
- K
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 15 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Tech Support
-
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Kartu Kredit
-
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