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Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Fluorinated Liquid Type, HRZ Series

Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Fluorinated Liquid Type, HRZ Series

[Features]
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ Compliant with various safety standards
・ UL, SEMI standard compliant, CE marking

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

Part Number
HRZ001-H
HRZ001-H-C
HRZ001-H-CZ
HRZ001-H-D
HRZ001-L-C
HRZ001-L-CN
HRZ001-L-CZ
HRZ001-L-DZ
HRZ001-L-N
HRZ002-H-C
HRZ002-H-CZ
HRZ002-H-D
HRZ002-H-DZ
HRZ002-L-CZ
HRZ002-W
HRZ002-W-CZ
HRZ002-W-DN
HRZ002-W-DZ
HRZ004-H
HRZ004-H-CZ
HRZ004-L-CZ
HRZ004-L-D
HRZ004-L-DZ
HRZ004-L-NZ
HRZ008-H-C
HRZ008-H-CZ
HRZ008-H-D
HRZ008-H-DZ
HRZ008-L-C
HRZ008-L-CZ
HRZ008-L-D
HRZ008-L-DZ
HRZ008-W-CNZ
HRZ008-W-D
HRZ008-W-DZ
Part NumberMinimum order quantityVolume DiscountDays to ShipCooling capacity Optional specifications Setting Temperature Range
1 Piece(s) 15 Day(s) 1 kWNone20 to 90℃
1 Piece(s) 15 Day(s) 1 kWAnalog communication20 to 90℃
1 Piece(s) 15 Day(s) 1 kWAnalog communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 1 kWDevice net communication20 to 90℃
1 Piece(s) 15 Day(s) 1 kWAnalog communication-20 to 40℃
1 Piece(s) 15 Day(s) 1 kWAnalog communication, NPT fitting-20 to 40℃
1 Piece(s) 15 Day(s) 1 kWAnalog communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 1 kWDevice net communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 1 kWNPT fitting-20 to 40℃
1 Piece(s) 15 Day(s) 2 kWAnalog communication20 to 90℃
1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 2 kWDevice net communication20 to 90℃
1 Piece(s) 15 Day(s) 2 kWDevice net communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 2 kWNone-20 to 90℃
1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection function-20 to 90℃
1 Piece(s) 15 Day(s) 2 kWDevice net communication, NPT fitting-20 to 90℃
1 Piece(s) 15 Day(s) 2 kWDevice net communication, automatic circulation fluid collection function-20 to 90℃
1 Piece(s) 15 Day(s) 4 kWNone20 to 90℃
1 Piece(s) 15 Day(s) 4 kWAnalog communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 4 kWAnalog communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 4 kWDevice net communication-20 to 40℃
1 Piece(s) 15 Day(s) 4 kWDevice net communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 4 kWNPT fitting, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 8 kWAnalog communication20 to 90℃
1 Piece(s) 15 Day(s) 8 kWAnalog communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication20 to 90℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication, automatic circulation fluid collection function20 to 90℃
1 Piece(s) 15 Day(s) 8 kWAnalog communication-20 to 40℃
1 Piece(s) 15 Day(s) 8 kWAnalog communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication-20 to 40℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication, automatic circulation fluid collection function-20 to 40℃
1 Piece(s) 20 Day(s) 8 kWAnalog communication, NPT fitting, automatic circulation fluid collection function-20 to 90℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication-20 to 90℃
1 Piece(s) 15 Day(s) 8 kWDevice net communication, automatic circulation fluid collection function-20 to 90℃

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Basic Information

Cooling method Water-cooled refrigeration type

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