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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

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Part Number

Configured Part Number is shown.

Part Number
10-IRV10-LN07BG
10-IRV20-N07B
11-MHZ2-25DN-M9B
22-MHZ2-20D-M9NLS
MHSHJ3-32D-M9BV
MHSHJ3-32DB-M9BWVL
MHSHJ3-32DBF-M9BVL
SJ3A6-6CUD
SJ3A6N-5NMOZD-DP
Part NumberMinimum order quantityVolume DiscountDays to ShipApplicable Fluid
(l/min)
Shape Supply Side, Connecting Tube Diameter Control Side, Connecting Tube Diameter Piping specifications Accessories Monitor output Supply side fitting shape Control side fitting shape Bracket Type
1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series
1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard_____Standard connectionsNo-StraightStraightWith bracketClean series
1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsNo-ElbowElbowNoClean series
1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)Standard_____Standard connectionsNo-StraightStraightNoClean series
1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard_____Standard connectionsWith Pressure Gauge-StraightStraightNoClean series
1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)Standard_____Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series
1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard_____Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series
1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard_____Standard connectionsNo-StraightStraightNoClean series
1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsNo-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

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Basic Information

Type Vacuum Regulator Control Method Directly Operated Supply Side, Connection Type One-Touch Plumbing
Control Side, Connection Type One-Touch Plumbing Customized specifications No

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