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Ceramic adsorption table

Ceramic adsorption table

[Features]
· Convenient for adsorption of green sheet, polyimide film, light/soft materials and thin materials.
· It is a porous ceramics adsorption table.
· The average pore diameter is 55 μm, which is smaller than the hole diameter made by machining, reducing the amount of distortion of the adsorbate.
· There is no need to worry about dust generated within the ceramic.
· It is made of ceramic and SUS, providing high rust resistance.
· Clogging and chipping of ceramic can be repaired as well

PDF

Japanese Only

Part Number

Configured Part Number is shown.

 
Part Number
CAT0507R
CAT0507S
CAT1012R
CAT1012S
CAT1517R
CAT1518S
CAT2022R
CAT2023S
CAT2527R
CAT2528S
CAT3032R
CAT3033S
Part NumberMinimum order quantityVolume DiscountDays to ShipA
(mm)
B
(mm)
C
(mm)
D
(mm)
E
(mm)
F
(mm)
G
(mm)
H
(mm)
I
(mm)
J
(mm)
K
(mm)
L
(mm)
M
(mm)
Flatness
(μm)
1 Piece(s) 52 Day(s) or more φ7015φ5045°φ56.5--8359--φ6215
1 Piece(s) 52 Day(s) or more 70155017.517.5-873594.226215
1 Piece(s) 52 Day(s) or more φ12015φ10045°φ106.5--8609--φ11215
1 Piece(s) 52 Day(s) or more 120151003030-876094.2211215
1 Piece(s) 52 Day(s) or more φ17015φ15045°φ156.5--8859--φ16215
1 Piece(s) 52 Day(s) or more 1801515045459010159094.2217215
1 Piece(s) 52 Day(s) or more φ22015φ20045°φ206.5--81109--φ21215
1 Piece(s) 52 Day(s) or more 2301520057.557.5115101511594.2222215
1 Piece(s) 52 Day(s) or more φ27020φ25045°φ256.5--813512--φ26225
1 Piece(s) 52 Day(s) or more 2802025070701401015140124.2227225
1 Piece(s) 52 Day(s) or more φ32020φ30045°φ306.5--816012--φ31225
1 Piece(s) 52 Day(s) or more 3302030082.582.51651015165124.2232225

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Basic Information

N(mm) 4 Material Upper surface: alumina ceramics base: SUS303 Specification 1 Average porosity: 30-35%
Specification 2 Average pore diameter: 55 μm

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